The 13th International Symposium on Linear Drives for Industry Application (LDIA2021)

404 / 2021-06-18 14:22:26

Drive and Control Technology for High Precision Linear Servo System

The direct-drive linear motion systems have been largely popularized to the industry applications, such as the precision machine tools and semiconductor equipment , due to its prominent superiority of high-velocity, high dynamic and high-precision. However, various disturbance/ uncertainty mainly caused by the endogenous parameter variation and exogenous perturbation impose large restrictions on the realization of these high-performance. Therefore, the disturbance/ uncertainty estimation and attenuation technique has aroused large interests in the industry.



In order to reach the full potential of the PMLSM-driven motion system, this speech will talk about two basic drive and control technologies for high precision linear servo system:

(1) high-bandwidth and strong robust current response method: the deadbeat predictive current control,

(2) high-precision and high-dynamic position tracking control: sliding mode control and observer.