The International Conference on Microelectronic Test Structures (ICMTS) is the premier conference devoted to the development, measurement and analysis of test structures providing a forum for designers and users of test structures to discuss recent developments and future directions The meeting is a IEEE conference, sponsored by the IEEE Electron Devices Society.
Technical Program Chair:
University of Texas, Dallas
Samsung Austin Semiconductor, LLC
Equipment Exhibition Chair:
Celadon Systems, Inc.
Original papers are solicited presenting new developments in topics relevant to ICMTS, including but not limited to, test structures, measurements, and results, in the following areas:
o Methodologies, verification
o Within-die circuits for process characterization/monitoring
o Design enablement – Characterization and validation of digital and analog libraries
• Measurement techniques
o DC, AC and RF measurements: setup, test and analysis
o Reliability test - including thermal stability, failure analysis etc.
o Statistical analysis, variability, throughput increase, smart test strategies
o Use of machine learning and AI in analysis of data sets - parameter extraction etc.
o Wafer probing, within-die measurements, in-line metrology
o Throughput, testing strategies, yield enhancement and process control tests
o Emerging memory technologies (single cell, arrays, and application in neural networks)
o Emerging transistor technologies for digital/analog/power applications
o Photonic devices - silicon integration, new displays (OLED, µ-displays)
o Flexible electronics and sensors (organic and inorganic materials)
o M(N)EMS, actuators, sensors, PV cells and other emerging device
Draft paper submission deadline
2018-03-19 United States2018 IEEE International Conference on Microelectronic Test Structures
2017-03-28 France Grenoble,France30th International Conference on Microelectronic Test Structures
2016-03-28 Japan Yokohama2016 International Conference on Microelectronic Test Structures (ICMTS)
2014-03-24 Italy2014 International Conference on Microelectronic Test Structures (ICMTS)
2013-03-25 Japan2013 IEEE International Conference on Microelectronic Test Structures (ICMTS)