The International Conference on Microelectronic Test Structures (ICMTS) is the premier conference devoted to the development, measurement and analysis of test structures providing a forum for designers and users of test structures to discuss recent developments and future directions The meeting is a IEEE conference, sponsored by the IEEE Electron Devices Society.

Sponsor Type:1


General Chair:

Brad Smith
NXP Semiconductors

Technical Program Chair:

Chadwin Young
University of Texas, Dallas

Tutorial Chair:

Matthew Rerecich
Samsung Austin Semiconductor, LLC

Equipment Exhibition Chair:

Garrett Tranquillo
Celadon Systems, Inc.

Local Arrangements:

Brad Smith
NXP Semiconductors

Call for paper

Important date

Draft paper submission deadline

Submission Topics

Original papers are solicited presenting new developments in topics relevant to ICMTS, including but not limited to, test structures, measurements, and results, in the following areas:

• Design

o Methodologies, verification
o Within-die circuits for process characterization/monitoring
o Design enablement – Characterization and validation of digital and analog libraries

• Measurement techniques

o DC, AC and RF measurements: setup, test and analysis
o Reliability test - including thermal stability, failure analysis etc.
o Statistical analysis, variability, throughput increase, smart test strategies
o Use of machine learning and AI in analysis of data sets - parameter extraction etc.
o Wafer probing, within-die measurements, in-line metrology
o Throughput, testing strategies, yield enhancement and process control tests

• Applications

o Emerging memory technologies (single cell, arrays, and application in neural networks)
o Emerging transistor technologies for digital/analog/power applications
o Photonic devices - silicon integration, new displays (OLED, µ-displays)
o Flexible electronics and sensors (organic and inorganic materials)
o M(N)EMS, actuators, sensors, PV cells and other emerging device

Submit Comment
Verify Code Change Another
All Comments
Important Date
  • Conference Date

    Apr 12



    Apr 15


  • Mar 17 2021

    Draft paper submission deadline

Sponsored By
IEEE Electron Devices Society
Contact Information
Scan the QR code×