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A Stator Design of Traveling-Wave Ultrasonic Micromotor
ID：4 View Protection：ATTENDEE Updated Time：2022-05-21 16:45:35 Hits：592 Poster Presentation

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Abstract
With the development of Microelectromechanical systems technology, piezoelectric traveling-wave ultrasonic micromotor has been widely used in micro equipment due to excellent performance, such as high-density output, high torque at low speed. A stator structure of ultrasonic motor working under the B15 mode is analyzed and designed, which consists of a ring Si substrate of 3mm in radius, twenty Lead zirconate titanate (PZT) blocks and twenty supporting beams. The finite element simulation results show that the structure can generate two nearly symmetrical standing wave modes with a quarter wavelength difference in phase, and has a high quality factor (Q), so the micromotor can be driven by synthesizing high quality traveling-wave from the two standing waves, and can control the rotate speed through the drive voltage.
 
Keywords
Traveling-wave ultrasonic micromotor; Annular stator; PZT; Standing-wave mode; Finite element simulation
Speaker
JinxuanXie
School of Mechanical Engineering, Nanjing University of Science and Technology, Jiangsu Research Center for Intelligent Navigation and Control of Complex Motion

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Important Date

  • Conference Date

    May 27

    2022

    to

    May 29

    2022

  • Feb 28 2022

    Draft paper submission deadline

  • May 29 2022

    Registration deadline

  • Jun 22 2022

    Contribution Submission Deadline

Sponsored By
IEEE Beijing Section
China Electrotechnical Society
Southeast University
Supported By
IEEE Industry Applications Society
IEEE Nanjing Section
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