The 9th International Conference on Surface Engineering (ICSE 2024)

The Vacuum Interconnected Nanotech Workstation (Nano-X) is located in the Suzhou Dushu Lake Science and Education Innovation District, which is co-built by the CAS, Jiangsu Province, SuzhouCity and Suzhou Industrial Park. The construction started in April 2014 and completed the phase-l and ll in June 2019 and February 2023, respectively. lt is the world's largest multifunctional research platform for nano-science and nano-technology, which integrates the state-of art capabilities of material growth, device fabrication and characterization/tests together under ultra-high vacuum environment, By connecting different instruments to ultra-high vacuum pipelines, NANO-X is aimed to solve residual particles surface/interface oxides and adsorptions and other contaminations problems, which are intractable in conventional cleanrooms.

ultra-high vacuum,surface intersurface