Presentation Details
Modal Characteristics of Quartz Tuning Fork Wet Etching Morphology Based on Finite Element Method
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Updated Time：2026-09-11 22:42:32 Hits：21
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Abstract
针对非理想石英湿蚀形态对器件性能影响的研究不足，本文以Z切割石英音叉为主题。建立了不同蚀刻时间下的理想和非理想有限元模型，以系统分析蚀刻形态的演变及其对内在力学性质的影响。结果显示，目标模态频率通常随着刻蚀时间降低，相邻模态之间的间隔趋于缩短。通过有效刚性和有效质量分析，澄清了控制不同刻蚀阶段频率变化的主导机制。模态形状评估表明，刻蚀不对称几乎不会影响靶面内反相模态。应变能量分布分析为电极优化提供了参考。这些发现为石英MEMS器件的制造误差评估和结构优化提供了理论支持。
Keywords
quartz tuning fork,non ideal morphology,modal analysis,finite element simulation
Speaker
祥林 谭
student Xidian UniversitySubmission Author
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Important Date
-
Conference Date
Nov 06
2026
toNov 08
2026
-
Oct 15 2026
Draft paper submission deadline
Sponsored By
IEEE Instrumentation and Measurement Society
Organized By
Sichuan University
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