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Introduction
We welcome you to participate in the 20th Biennial IEEE UGIM (University Government Industry Micro/nano) Symposium. The goal of this symposium is to bring together leading educators and researchers from university, government, and industry around the world to discuss issues related to R&D cleanroom laboratories and trends therein. Representatives of university micro/nano fabrication facilities, ranging from new labs to nationally recognized facilities, have found this symposium an excellent forum for exchanging information and presenting new research and educational concepts. Agencies such as NSF, NIH, NIST, SEMATECH, SRC, DoD and ONR regularly participate. Industry interactions with universities, including technology transfer, collaborative research, and training efforts are frequently presented. The UGIM symposium will be held on the campus of Harvard University.
Call for paper

Important date

2014-02-14
Abstract submission deadline

Submission Topics

Presentations on the Following Topics 1. Multi-User Facility Operations 2. Laboratory Safety and discipline 3. Anti-Contamination Policies 4. Supporting Numerous Wafer Materials and Sizes 5. Lab Control Systems, Instrument Interlocks, El
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Important Date
  • Conference Date

    Jun 15

    2014

    to

    Jun 17

    2014

  • Feb 14 2014

    Abstract Submission Deadline

  • Jun 17 2014

    Registration deadline

Sponsored By
Harvard University
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